1. Research › Journal article
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    Comparison of High Resolution Negative Electron Beam Resists. / Olsen, Brian Bilenberg; Schøler, Mikkel; Shi, Peixiong; Schmidt, Michael Stenbæk; Bøggild, Peter; Fink, M.; Schuster, C.; Reuther, F.; Gruetzner, C.; Kristensen, Anders.

    In: Journal of Vacuum Science & Technology B, Vol. 24, No. 4, 2006, p. 1776-1779.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

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    A flexible infrared sensor for tissue oximetry. / Petersen, Søren Dahl; Thyssen, Anders; Engholm, Mathias; Thomsen, Erik Vilain.

    In: Microelectronic Engineering, Vol. 111, 2013, p. 130-136.

    Publication: Research - peer-reviewJournal article – Annual report year: 2013

  7. Published

    Silicon waveguides produced by wafer bonding. / Poulsen, Mette; Jensen, Flemming; Bunk, Oliver; Feidenhans'l, Robert Krarup; Breiby, Dag Werner.

    In: Applied Physics Letters, Vol. 87, No. 26, 2005, p. 261904.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

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    Large area fabrication of leaning silicon nanopillars for surface enhanced raman spectroscopy. / Schmidt, Michael Stenbæk; Hübner, Jörg; Boisen, Anja.

    In: Advanced Materials, Vol. 24, 2011, p. OP11-OP18.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

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