Department of Micro- and Nanotechnology

  1. 2006
  2. Published

    Sloped side walls in SU-8 structures with 'Step-and-Flash' processing. / Nordström, Maria; Hübner, Jörg; Boisen, Anja.

    In: Microelectronic Engineering, Vol. 83, No. 4-9, 2006, p. 1269-1272.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  3. Published

    Spectroscopic studies of small biomolecules in condensed phases. / Bohr, Henrik; Jalkanen, Karl J.

    Condensed Matter Theories. Vol. 20 2006. p. 375-391.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2006

  4. Published

    Spin-orbit induced spin-qubit control in nanowires. / Flindt, Christian; Sørensen, A.S.; Flensberg, K.

    2006. Abstract from ICN+T 2006, Basel, Switzerland, .

    Publication: ResearchConference abstract for conference – Annual report year: 2006

  5. Published

    Spin-orbit mediated control of spin qubits. / Flindt, Christian; Sørensen, A.S; Flensberg, Karsten.

    In: Physical Review Letters, Vol. 97, No. 24, 2006, p. 240501.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  6. Published
  7. Published

    Study of the roughness in a photoresist masked, isotropic, SF6-based ICP silicon etch. / Larsen, Kristian Pontoppidan; Petersen, Dirch Hjorth; Hansen, Ole.

    In: Electrochemical Society. Journal, Vol. 153, No. 12, 2006, p. G1051-G1058.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  8. Published

    SU-8 cantilever chip interconnection. / Johansson, Alicia Charlotte; Janting, Jakob; Schultz, Peter; Hoppe, K.; Hansen, I.N.; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 2, 2006, p. 314-319.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  9. Published

    Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography. / Kehagias, N.; Reboud, Vincent; Chansin, G.; Zelsmann, M.; Jeppesen, Claus; Reuther, F.; Schuster, C.; Kubenz, M.; Gruetzner, G.; Torres, C.M.S.

    In: Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures, Vol. 24, No. 6, 2006, p. 3002-3005.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  10. Published

    Surface stress measurements in liquid using SU-8 cantilevers with integrated readout. / Johansson, Alicia; Blagoi, Gabriela; Boisen, Anja.

    Proceedings of the Micro and Nano Engineering 2006 International Conference. 2006. p. 49-50.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2006

  11. Published

    Synthesis and Characterization of Tunable and Highly Transparent Thick. / Simone, Giuseppina; Perozziello, Gerardo; Tagliaferri, V.; Szita, Nicolas.

    Nanoparticles Proceedings of the Materials Research Society, Fall Meeting 2006, Symposium. Boston, USA, 2006.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2006

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