Department of Micro- and Nanotechnology

  1. 2003
  2. Published

    A novel reversible packaging for microfluidic systems. / Perozziello, Gerardo; Geschke, Oliver.

    2003. Paper presented at CIRP Seminar on Micro- and Nanotechnology, Copenhagen, Denmark.

    Publication: Research - peer-reviewPaper – Annual report year: 2003

  3. Published

    Atomic force microscope characterization of a resonating nanocantilever. / Abadal, G.; Davis, Zachary James; Borrise, X.; Hansen, Ole; Boisen, Anja; Barniol, N.; Perez-Murano, F.; Serra, F.

    In: Ultramicroscopy, Vol. 97, No. 1-4, 2003, p. 127-133.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  4. Published

    Batch Fabrication of Through-Wafer Vias In CMOS Wafers for 3-D Packaging Applications. / Rasmussen, Frank Engel; Heschel, M.; Hansen, Ole.

    Proceedings of the 53rd Electronic Components and Technology Conference (ECTC). 2003. p. 634-639.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2003

  5. Published

    beta-sheet preferences from first principles. / Rossmeisl, Jan; Bækgaard, Iben Sig Buur; Gregersen, Misha Marie; Nørskov, Jens Kehlet; Jacobsen, Karsten Wedel.

    In: American Chemical Society. Journal, Vol. 125, No. 52, 2003, p. 16383-16386.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  6. Published

    Characterization of MEMS Pressure Sensor Packaging Concept using O-rings as Hermetic Sealing. / Pedersen, Casper; Jespersen, Simon Tage; Jacobsen, K.W.; Krog, J.P.; Christensen, C.; Thomsen, Erik Vilain.

    Proceedings of the 17th European Conference on Solid-State Tranducers (Eurosensors). 2003. p. 418-421.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2003

  7. Published

    Checkerboard local density of states in striped domains pinned by vortices. / Andersen, B.M.; Hedegård, P.; Bruus, Henrik.

    In: Physical Review B (Condensed Matter and Materials Physics), Vol. 67, No. 13, 2003, p. 134528.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  8. Published

    Clean Rooms. / Petersen, Daria; Telleman, Pieter.

    Microsystem Engineering of Lab-on-a-Chip Devices. ed. / Oliver Geschke; Henning Klank; Pieter Telleman. VCH-Wiley, Weinheim, 2003.

    Publication: Research - peer-reviewBook chapter – Annual report year: 2003

  9. Published

    CMOS integrated nickelelectroplated comb-drive resonators. / Yalcinkaya, Arda Deniz; Hansen, Ole.

    Proceedings of the Nordic Semiconductor Meeting Paper 1037. 2003.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2003

  10. Published

    CO2 laser microfabrication of an integrated microfluidic manifold for application in environmental monitoring. / Bowden, M.; Geschke, Oliver; Kutter, Jörg Peter; Diamond, D.

    In: Lab On a Chip, Vol. 3, No. 4, 2003, p. 221-223.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  11. Published

    Combined Differential and Relative MEMS Pressure Sensor based on a Double-bridged Structure. / Pedersen, Casper; Jespersen, Simon Tage; Krog, J.P.; Christensen, C.; Thomsen, Erik Vilain.

    Proceedings of the IEEE Sensors. 2003.

    Publication: Research - peer-reviewArticle in proceedings – Annual report year: 2003

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