Department of Micro- and Nanotechnology

  1. Research › Journal article
  2. Published

    Advantages of PZT thick film for MEMS sensors. / Hindrichsen, Christian Carstensen; Lou-Moller, R.; Hansen, K.; Thomsen, Erik Vilain.

    In: Sensors and Actuators A: Physical, Vol. 163, No. 1, 2010, p. 9-14.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

  3. Published
  4. Published

    A flexible infrared sensor for tissue oximetry. / Petersen, Søren Dahl; Thyssen, Anders; Engholm, Mathias; Thomsen, Erik Vilain.

    In: Microelectronic Engineering, Vol. 111, 2013, p. 130-136.

    Publication: Research - peer-reviewJournal article – Annual report year: 2013

  5. Published

    AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection. / Villarroya, María; Pérez-Murano, Fransesc; Martín, Cristina; Davis, Zachary James; Boisen, Anja; Esteve, Jaume; Figueras, Eduard; Montserrat, Josep; Barniol, Núria.

    In: Nanotechnology, Vol. 15, No. 7, 2004, p. 771–776.

    Publication: Research - peer-reviewJournal article – Annual report year: 2004

  6. Published

    AFM lithography of aluminum for fabrication of nanomechanical systems. / Davis, Zachary James; Abadal, G.; Hansen, Ole; Borisé, X.; Barniol, N.; Perez-Murano, F.; Boisen, Anja.

    In: Ultramicroscopy, Vol. 97, No. 1-4, 2003, p. 467-472.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  7. Published

    AFM probes with directly fabricated tips. / Boisen, Anja; Hansen, Ole; Bouwstra, Siebe.

    In: J. Micromech. Microeng., Vol. 6, 1996, p. 58-62.

    Publication: Research - peer-reviewJournal article – Annual report year: 1996

  8. Published

    AFM probe with piezorestive read-out and highly symmentrical Wheatstone bridge arrangement. / Thaysen, Jacob; Boisen, Anja; Hansen, Ole; Bouwstra, Siebe.

    In: Sensors and Actuators, Vol. 83, No. 83, 2000, p. 47-53.

    Publication: Research - peer-reviewJournal article – Annual report year: 2000

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