Microelectronic Engineering
ISSNs: 01679317
Local database
Journal
- 2011
- Published
3D microstructuring of biodegradable polymers. / Nagstrup, Johan; Keller, Stephan Sylvest; Almdal, Kristoffer; Boisen, Anja.
In: Microelectronic Engineering, Vol. 88, No. 8, 2011, p. 2342-2344.Publication: Research - peer-review › Conference article – Annual report year: 2011
- Published
Deposition of biopolymer films on micromechanical sensors. / Keller, Stephan Sylvest; Gammelgaard, Lene; Jensen, Marie P.; Schmid, Silvan; Davis, Zachary James; Boisen, Anja.
In: Microelectronic Engineering, Vol. 88, No. 8, 2011, p. 2297-2299.Publication: Research - peer-review › Conference article – Annual report year: 2011
- Published
Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing. / Larsen, Tom; Keller, Stephan Sylvest; Schmid, Silvan; Dohn, Søren; Boisen, Anja.
In: Microelectronic Engineering, Vol. 88, No. 8, 2011, p. 2311-2313.Publication: Research - peer-review › Conference article – Annual report year: 2011
- Published
Modeling and simulation of stamp deflections in nanoimprint lithography: Exploiting backside grooves to enhance residual layer thickness uniformity. / Taylor, Hayden; Smistrup, Kristian; Boning, Duane.
In: Microelectronic Engineering, Vol. 88, No. 8, 2011, p. 2154-2157.Publication: Research - peer-review › Conference article – Annual report year: 2012
- Published
Optimization of FIB milling for rapid NEMS prototyping. / Malm, Bjarke; Petersen, Dirch Hjorth; Lei, Anders; Booth, Tim; Homann, Lasse Vinther; Bøggild, Peter.
In: Microelectronic Engineering, Vol. 88, No. 8, 2011, p. 2671-2674.Publication: Research - peer-review › Conference article – Annual report year: 2011