• Published

  Modeling and simulation of stamp deflections in nanoimprint lithography: Exploiting backside grooves to enhance residual layer thickness uniformity

  Publication: Research - peer-review › Conference article – Annual report year: 2012

• Published

  Optimization of FIB milling for rapid NEMS prototyping

  Publication: Research - peer-review › Conference article – Annual report year: 2011

• Published

  Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing

  Publication: Research - peer-review › Conference article – Annual report year: 2011

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