Microelectronic Engineering

ISSNs: 0167-9317, 0167-9317

Additional searchable ISSN (Electronic): 1873-5568

Elsevier BV, Netherlands

BFI (2015): BFI-level 2, ISI indexed (2013): ISI indexed yes

Central database

Journal

  1. 2016
  2. Published

    Quality control of JEOL JBX-9500FSZ e-beam lithography system in a multi-user laboratory. / Greibe, Tine; Anhøj, Thomas Aarøe; Johansen, Leif; Han, Anpan.

    In: Microelectronic Engineering, Vol. 155, 2016, p. 25-28.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  3. 2015
  4. Published
  5. Published

    Multi-height structures in injection molded polymer. / Andersen, Nis Korsgaard; Taboryski, Rafael J.

    In: Microelectronic Engineering, Vol. 141, 2015, p. 211-214.

    Publication: Research - peer-reviewJournal article – Annual report year: 2015

  6. Published
  7. 2014
  8. Controlled assembly of gold nanorods on nanopatterned surfaces: Effects of surface materials, pH and surfactant.. / Erola, Markus O. A.; Partanen, Anni; Okoro, Sunday Chukwudi; Rahman, Shakil Md.; Lajunen, Hanna; Suvanto, Sari; Suvanto, Mika; Kuittinen, Markku; Pakkanen, Tuula T.

    In: Microelectronic Engineering, Vol. 121, 2014, p. 76-79.

    Publication: Research - peer-reviewJournal article – Annual report year: 2014

  9. Published
  10. Published

    Injection moulding antireflective nanostructures. / Christiansen, Alexander Bruun; Clausen, Jeppe Sandvik; Mortensen, N. Asger; Kristensen, Anders.

    In: Microelectronic Engineering, Vol. 121, 2014, p. 47-50.

    Publication: Research - peer-reviewJournal article – Annual report year: 2014

  11. Published
  12. Published

    Nanoimprinted DWDM laser arrays on indium phosphide substrates. / Smistrup, Kristian; Nørregaard, Jesper ; Mironov, Andrej; Bro, Tobias H.; Bilenberg, Brian; Nielsen, Theodor; Eriksen, Johan; Thilsted, Anil Haraksingh; Hansen, Ole; Kristensen, Anders; Rishton, Stephen; Khan, ferdous; Emanuel, Mark; Ma, Young; Zhang, Yin.

    In: Microelectronic Engineering, Vol. 126, 2014, p. 149-153.

    Publication: Research - peer-reviewJournal article – Annual report year: 2014

  13. Published

    Single-spot e-beam lithography for defining large arrays of nano-holes. / Højlund-Nielsen, Emil; Greibe, Tine; Mortensen, N. Asger; Kristensen, Anders.

    In: Microelectronic Engineering, Vol. 121, 2014, p. 104-107.

    Publication: Research - peer-reviewJournal article – Annual report year: 2014

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