Microelectronic Engineering

ISSNs: 0167-9317

Additional searchable ISSN (Electronic): 1873-5568

Elsevier BV, Netherlands

BFI (2017): BFI-level 2, Scopus rating (2016): CiteScore 1.69 SJR 0.606 SNIP 0.999, ISI indexed (2013): ISI indexed yes, Web of Science (2017): Indexed Yes

Central database

Journal

  1. 2017
  2. Published

    Direct bonding of ALD Al2O3 to silicon nitride thin films. / Laganà, Simone; Mikkelsen, E. K.; Marie, Rodolphe ; Hansen, Ole; Mølhave, Kristian.

    In: Microelectronic Engineering, Vol. 176, 2017, p. 71-74.

    Publication: Research - peer-reviewJournal article – Annual report year: 2017

  3. Published

    High throughput soft embossing process for micro-patterning of PEDOT thin films. / Fanzio, Paola; Cagliani, Alberto; Peterffy, Kristof G.; Sasso, Luigi.

    In: Microelectronic Engineering, Vol. 176, 2017, p. 15-21.

    Publication: Research - peer-reviewJournal article – Annual report year: 2017

  4. Published
  5. Published
  6. Published

    Replication of micro-sized pillars in polypropylene using the extrusion coating process. / Okulova, Nastasia; Johansen, Peter; Christensen, Lars; Taboryski, Rafael J.

    In: Microelectronic Engineering, Vol. 176, 2017, p. 54-57.

    Publication: Research - peer-reviewJournal article – Annual report year: 2017

  7. Published
  8. 2016
  9. Published

    Quality control of JEOL JBX-9500FSZ e-beam lithography system in a multi-user laboratory. / Greibe, Tine; Anhøj, Thomas Aarøe; Johansen, Leif; Han, Anpan.

    In: Microelectronic Engineering, Vol. 155, 2016, p. 25-28.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  10. 2015
  11. Published
  12. Published

    Multi-height structures in injection molded polymer. / Andersen, Nis Korsgaard; Taboryski, Rafael J.

    In: Microelectronic Engineering, Vol. 141, 2015, p. 211-214.

    Publication: Research - peer-reviewJournal article – Annual report year: 2015

  13. Published
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