Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

ISSNs: 1071-1023

American Institute of Physics, United States

FI (2012): 1, ISI indexed (2012): yes

Central database

Journal

Publications

(27)

Published
Crystallographic dependence of the lateral undercut wet etch rate of Al_0.5In_0.5P in diluted HCl for III-V sacrificial release
Publication: Research - peer-review › Journal article – Annual report year: 2013
Published
Growth of GaSb₁-_xBi_x by molecular beam epitaxy
Publication: Research - peer-review › Journal article – Annual report year: 2012
Published
Electrical characterization of InGaAs ultra-shallow junctions
Publication: Research - peer-review › Journal article – Annual report year: 2010

ID: 77977