Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures

ISSNs: 1071-1023, 2166-2746

Additional searchable ISSN (Electronic): 1520-8567

American Institute of Physics, United States

BFI (2018): BFI-level 1, Scopus rating (2017): CiteScore 1.25 SJR 0.467 SNIP 0.631, Web of Science (2018): Indexed yes, ISI indexed (2013): ISI indexed yes

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ID: 77977

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