Journal of Micromechanics and Microengineering

ISSNs: 0960-1317, 0960-1317

Additional searchable ISSN (Electronic): 1361-6439

Institute of Physics Publishing, United Kingdom

BFI (2015): BFI-level 1, ISI indexed (2013): ISI indexed yes

Central database

Journal

  1. 2016
  2. Published
  3. Published

    Modelling the deformations during the manufacturing of nanostructures on non-planar surfaces for injection moulding tool inserts : Paper. / Sonne, M. R. ; Cech, J.; Pranov, H.; Kofod, G.; Garnæs, J.; Lam, Y. C.; Hattel, J. H.; Taboryski, R.

    In: Journal of Micromechanics and Microengineering, Vol. 26, No. 3, 035014, 2016.

    Publication: Research - peer-reviewJournal article – Annual report year: 2016

  4. 2015
  5. Published
  6. Published
  7. Published
  8. Published

    Geometric effects on mixing performance in a novel passive micromixer with trapezoidal-zigzag channels. / The, Hai Le; Ta, Bao Quoc; Lê Thanh, Hoà; Dong, Tao; Thoi, Trung Nguyen; Karlsen, Frank.

    In: Journal of Micromechanics and Microengineering, Vol. 25, No. 9, 094004, 2015.

    Publication: Research - peer-reviewJournal article – Annual report year: 2015

  9. Published

    Hydrogen silsesquioxane mold coatings for improved replication of nanopatterns by injection molding. / Hobæk, Thor Christian; Matschuk, Maria; Kafka, Jan ; Pranov, Henrik J.; Larsen, Niels Bent.

    In: Journal of Micromechanics and Microengineering, Vol. 25, No. 3, 2015, p. 035018.

    Publication: Research - peer-reviewJournal article – Annual report year: 2015

  10. Published

    Optical mapping of single-molecule human DNA in disposable, mass-produced all-polymer. / Østergaard, Peter Friis; Lopacinska-Jørgensen, Joanna; Pedersen, Jonas Nyvold; Tommerup, Niels; Kristensen, Anders; Flyvbjerg, Henrik; Silahtaroglu, Asli; Marie, Rodolphe ; Taboryski, Rafael J.

    In: Journal of Micromechanics and Microengineering, Vol. 25, 2015, p. 105002.

    Publication: Research - peer-reviewJournal article – Annual report year: 2015

  11. Published
  12. 2014
  13. Published

    Accounting for PDMS shrinkage when replicating structures. / Madsen, Morten Hannibal; Feidenhans'l, Nikolaj Agentoft; Hansen, Poul-Erik; Garnæs, Jørgen; Dirscherl, Kai.

    In: Journal of Micromechanics and Microengineering, Vol. 24, No. 12, 2014, p. 127002.

    Publication: Research - peer-reviewJournal article – Annual report year: 2014

  14. Published
  15. Published

    Nanostructuring steel for injection molding tools. / Al-Azawi, A.; Smistrup, Kristian; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 24, No. 5, 055023, 2014.

    Publication: Research - peer-reviewJournal article – Annual report year: 2014

  16. 2013
  17. Published

    An electret-based energy harvesting device with a wafer-level fabrication process. / Crovetto, Andrea; Wang, Fei; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 11, 2013, p. 114010.

    Publication: Research - peer-reviewJournal article – Annual report year: 2013

  18. Published
  19. Published

    Fabrication and bonding of thiol-ene-based microfluidic devices : Technical Note. / Sikanen, Tiina M; Lafleur, Josiane P.; Moilanen, Maria-Elisa; Zhuang, Guisheng; Jensen, Thomas Glasdam; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 3, 2013.

    Publication: Research - peer-reviewJournal article – Annual report year: 2013

  20. Published

    High-performance spinning device for DVD-based micromechanical signal transduction. / Hwu, En-Te; Chen, Ching-Hsiu; Bosco, Filippo; Wang, Wei-Min; Ko, Hsien-Chen; Hwang, Ing-Shouh; Boisen, Anja; Huang, Kuang-Yuh.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 4, 2013, p. 045016.

    Publication: Research - peer-reviewJournal article – Annual report year: 2013

  21. Published

    Injection molding of high aspect ratio sub-100 nm nanostructures. / Matschuk, Maria; Larsen, Niels B.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 2, 2013, p. 025003.

    Publication: Research - peer-reviewJournal article – Annual report year: 2012

  22. Published

    Modular microfluidic systems using reversibly attached PDMS fluid control modules.. / Skafte-Pedersen, Peder; Sip, Christopher G.; Folch, Albert; Dufva, Martin.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 5, 2013, p. 1-10.

    Publication: Research - peer-reviewJournal article – Annual report year: 2013

  23. Published

    Tunable-angle wedge transducer for improved acoustophoretic control in a microfluidic chip. / Iranmanesh, I.; Barnkob, Rune; Bruus, Henrik; Wiklund, M.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 10, 2013, p. 105002.

    Publication: Research - peer-reviewJournal article – Annual report year: 2013

  24. 2012
  25. Published

    Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters. / Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian ; Hansen, K; Guizzetti, M; Birkelund, Karen; Thomsen, Erik Vilain; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 9, 2012.

    Publication: Research - peer-reviewJournal article – Annual report year: 2012

  26. Published
  27. Published

    High-throughput, temperature-controlled microchannel acoustophoresis device made with rapid prototyping. / Adams, Jonathan D; Ebbesen, Christian L.; Barnkob, Rune; Yang, Allen H J; Soh, H Tom; Bruus, Henrik.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 7, 2012, p. Paper 075017.

    Publication: Research - peer-reviewJournal article – Annual report year: 2012

  28. Three-dimensional magnetic terahertz metamaterials using a multilayer electroplating technique. / Fan, K.; Strikwerda, A.C.; Averitt, R.D.; Zhang, X.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 4, 2012, p. 045011.

    Publication: Research - peer-reviewJournal article – Annual report year: 2012

  29. 2011
  30. Published

    Anti-stiction coating of PDMS moulds for rapid microchannel fabrication by double replica moulding. / Zhuang, Guisheng; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 10, 2011, p. 105020.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  31. Published
  32. Published

    Controlled deposition of sol–gel sensor material using hemiwicking. / Mikkelsen, Morten Bo Lindholm; Marie, Rodolphe; Hansen, Jan H; Wencel, Dorota; McDonagh, Colette; Nielsen, Hans Ole; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 11, 2011, p. 115008.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  33. Published

    Fabrication of a cantilever-based microfluidic flow meter with nL min(-1) resolution. / Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 1, 2011, p. 015007.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  34. Published

    Fusion bonding of silicon nitride surfaces. / Reck, Kasper; Østergaard, Christian; Thomsen, Erik Vilain; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 12, 2011, p. 125015.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  35. Published

    Hot embossing of photonic crystal polymer structures with a high aspect ratio. / Schelb, Mauno; Vannahme, Christoph; Kolew, Alexander; Mappes, Timo.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 2, 2011, p. 025017.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  36. Published
  37. Published

    Roll-to-roll fabricated lab-on-a-chip devices. / Vig, Asger Laurberg; Mäkelä, Tapio; Majander, Päivi; Lambertini, Vito; Ahopelto, Jouni; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 3, 2011, p. 035006.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  38. Published

    Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers. / Suter, M; Ergeneman, O; Zürcher, J; Schmid, Silvan; Camenzind, A; Nelson, B J; Hierold, C.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 2, 2011, p. 025023.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  39. Published
  40. Published

    Ultrasensitive bulk disk microresonator-based sensor for distributed mass sensing. / Cagliani, Alberto; Davis, Zachary James.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 4, 2011, p. 045016.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  41. Published

    Vertically aligned CNT growth on a microfabricated silicon heater with integrated temperature control—determination of the activation energy from a continuous thermal gradient. / Engstrøm, Daniel Southcott; Rupesinghe, Nalin L; Teo, Kenneth B K; Milne, William I; Bøggild, Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 1, 2011, p. 015004.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  42. 2010
  43. Published

    Electroless porous silicon formation applied to fabrication of boron-silica-glass cantilevers. / Teva, Jordi; Davis, Zachary James; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, p. 015034.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

  44. E-pub ahead of print
  45. Published

    Fabrication of thin SU-8 cantilevers: initial bending, release and time stability. / Keller, Stephan Urs; Haefliger, D.; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 4, 2010, p. 45024.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

  46. Published

    Fast prototyping of injection molded polymer microfluidic chips. / Hansen, Thomas Steen; Selmeczi, David; Larsen, Niels Bent.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, p. 015020.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

  47. Published
  48. Published
  49. Published
  50. Published

    MEMS climate sensor for crops in greenhouses. / Birkelund, Karen; Jensen, Kim Degn; Højlund-Nielsen, Emil; Nagstrup, Johan; Lei, Anders; Petersen, Søren D.; Andreassen, Andrea U.; Thomsen, Erik Vilain.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 8, 2010, p. 085021.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

  51. Published
  52. Published
  53. Published
  54. Published
  55. 2009
  56. Published

    A support structure for biomimetic applications. / Vogel, Jörg; Perry, Mark; Hansen, Jesper Søndergaard; Pierre-Yves, Bolinger; Helix Nielsen, Claus; Geschke, Oliver.

    In: Journal of Micromechanics and Microengineering, Vol. 19, No. 2, 2009, p. 025026.

    Publication: Research - peer-reviewJournal article – Annual report year: 2009

  57. Published
  58. Published
  59. Published
  60. 2008
  61. Published

    A compact system for large-area thermal nanoimprint lithography using smart stamps. / Pedersen, Rasmus Haugstrup; Hansen, Ole; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 5, 2008, p. 055018.

    Publication: Research - peer-reviewJournal article – Annual report year: 2008

  62. Published

    An Electrochromatography Chip with Integrated Waveguides for UV Absorbance Detection. / Gustafsson, Omar; Mogensen, Klaus Bo; Ohlsson, Pelle Daniel; Liu, Y; Jacobson, S. C.; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 5, 2008, p. 055021.

    Publication: Research - peer-reviewJournal article – Annual report year: 2008

  63. Published

    A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides. / Nordström, M.; Calleja, M.; Hübner, Jörg; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 1, 2008.

    Publication: Research - peer-reviewJournal article – Annual report year: 2008

  64. Published
  65. Published

    Processing of thin SU-8 films. / Keller, Stephan Urs; Blagoi, Gabriela; Lillemose, Michael; Häfliger, Daniel; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 12, 2008, p. 125020.

    Publication: Research - peer-reviewJournal article – Annual report year: 2008

  66. 2007
  67. Published
  68. Published
  69. Published
  70. Published
  71. 2006
  72. Published
  73. Published
  74. Published

    Low-energy, turning microvalve with high-pressure seals: scaling of friction. / Bitsch, Lennart; Kutter, Jörg Peter; Storgaard-Larsen, T.; Bruus, Henrik.

    In: Journal of Micromechanics and Microengineering, Vol. 16, 2006, p. 2121-2127.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  75. Published

    SU-8 cantilever chip interconnection. / Johansson, Alicia Charlotte; Janting, Jakob; Schultz, Peter; Hoppe, K.; Hansen, I.N.; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 2, 2006, p. 314-319.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  76. Published

    Temperature effects in Au piezoresistors integrated in SU-8 cantilever chips. / Johansson, Alicia; Hansen, Ole; Hales, Jan Harry; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 12, 2006, p. 2564–2569.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  77. Published
  78. Published

    Thermal stability of vapor phase deposited self-assembled monolayers for MEMS anti-stiction. / Zhuang, Yanxin; Hansen, Ole; Knieling, Thomas; Wang, Christian; Rombach, Pirmin; Lang, Walter; Benecke, Wolfgang; Kehlenbeck, Markus; Koblitz, Jörn.

    In: Journal of Micromechanics and Microengineering, Vol. 16, 2006, p. 2259-2264.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  79. Published

    Three-dimensional microfabrication in negative resist using printed masks. / Häfliger, Daniel; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 5, 2006, p. 951-957.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  80. Published

    Transient pressure drops of gas bubbles passing through liquid-filled microchannel Contractions: an experimental study. / Chio, H.; Jensen, Mads Jakob; Wang, X.; Bruus, Henrik; Attinger, D.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 1, 2006, p. 143-149.

    Publication: Research - peer-reviewJournal article – Annual report year: 2006

  81. 2005
  82. Published
  83. Published
  84. Published

    Double sided surface stress cantilever sensor. / Rasmussen, P.A.; Grigorov, Alexander; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 5, 2005, p. 1088–1091.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  85. Published
  86. Published

    Electro-thermally actuated microgrippers with integrated force feedback. / Mølhave, Kristian; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 6, 2005, p. 1265-1270.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  87. Published

    Fabrication of reverse symmetry polymer waveguide sensor chips on nanoporous substrates using dip-floating. / Horvath, R.; Pedersen, H.C.; Skivesen, N.; Svanberg, C.; Larsen, N.B.

    In: Journal of Micromechanics and Microengineering, Vol. 15, 2005, p. 1260-1264.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  88. Published
  89. Published

    Refractive microlenses produced by excimer laser machining of poly(methyl methacrylate). / Jensen, Martin Frøhling; Krühne, Ulrich; H., L.; Geschke, Oliver.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 1, 2005, p. 91-97.

    Publication: Research - peer-reviewJournal article – Annual report year: 2005

  90. Published
  91. Published
  92. 2004
  93. Published

    Microstructure Fabrication with a CO_2 Laser System. / Snakenborg, Detlef; Klank, Henning; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 14, No. 2, 2004, p. 182-189.

    Publication: Research - peer-reviewJournal article – Annual report year: 2004

  94. Published
  95. Published

    Rendering SU-8 hydrophilic to facilitate use in micro channel fabrication. / Nordström, Maria; Marie, Rodolphe; Gomez, Montserrat; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 14, No. 12, 2004, p. 1614-1617.

    Publication: Research - peer-reviewJournal article – Annual report year: 2004

  96. Published

    The clogging pressure of bubbles in hydrophilic microchannel contractions. / Jensen, Mads Jakob; Goranovic, Goran; Bruus, Henrik.

    In: Journal of Micromechanics and Microengineering, Vol. 14, 2004, p. 876-883.

    Publication: Research - peer-reviewJournal article – Annual report year: 2004

  97. 2003
  98. Published

    A Micro-Cavity Fluidic Dye Laser. / Helbo, Bjarne; Kristensen, Anders; Menon, Aric Kumaran.

    In: Journal of Micromechanics and Microengineering, Vol. 13, No. 2, 2003, p. 307-311.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  99. Published

    Fabrication of all-polymer freestanding waveguides. / Horvath, R.; Lindvold, Lars René; Larsen, N.B.

    In: Journal of Micromechanics and Microengineering, Vol. 13, 2003, p. 419-424.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  100. Published

    Fabrication of silicon molds for polymer optics. / Nilsson, Daniel; Jensen, Søren; Menon, Aric Kumaran.

    In: Journal of Micromechanics and Microengineering, Vol. 13, No. 4, 2003, p. 57-61.

    Publication: Research - peer-reviewJournal article – Annual report year: 2003

  101. 2002
  102. Published

    PIV measurements in a microfluidic 3D-sheathing structure with three-dimensional flow behaviour. / Klank, Henning; Goranovic, Goran; Kutter, Jörg Peter; Gjelstrup, Henrik; Michelsen, J.; Westergaard, C.H.

    In: Journal of micromechanics and microengineering, Vol. 12, No. 6, 2002, p. 862-869.

    Publication: Research - peer-reviewJournal article – Annual report year: 2002

  103. 2001
  104. Published

    Balanced membrane micromachined loudspeaker for hearing instrument application. / Rehder, Jörg; Rombach, Pirmin; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 11, No. 4, 07.2001, p. 334-338.

    Publication: Research - peer-reviewJournal article – Annual report year: 2001

  105. 1999
  106. Published

    Fabrication and characterization of a piezoelectric accelerometer. / Reus, Roger De; Gulløv, Jens; Scheeper, Patrick.

    In: Journal of Micromechanics and Microengineering, Vol. 9, No. 2, 1999, p. 123-126.

    Publication: Research - peer-reviewJournal article – Annual report year: 1999

  107. Published

    Microfabrication of PPy microactuators and other conjugated polymer devices. / Smela, E.

    In: Journal of Micromechanics and Microengineering, Vol. 9, 1999, p. 1-18.

    Publication: Research - peer-reviewJournal article – Annual report year: 1999

  108. Published

    Micromachined double backplate differential capacitive microphone.. / Bay, Jesper; Hansen, Ole; Bouwstra, Siebe.

    In: Journal of Micromechanics and Microengineering, Vol. 9, No. 1, 1999, p. 30-33.

    Publication: Research - peer-reviewJournal article – Annual report year: 1999

  109. Published

    Tantalum oxide films as protective coatings for sensors. / Christensen, Carsten; Reus, Roger De; Bouwstra, Siebe.

    In: Journal of Micromechanics and Microengineering, Vol. 9, No. 2, 1999, p. 113-18.

    Publication: Research - peer-reviewJournal article – Annual report year: 1999

  110. Published

    Tantalum oxide thin films as protective coatings for sensors.. / Christensen, Carsten; Reus, Roger De; Bouwstra, Siebe.

    In: Journal of Micromechanics and Microengineering, Vol. 9, No. 2, 1999, p. 113-118.

    Publication: Research - peer-reviewJournal article – Annual report year: 1999

  111. 1998
  112. Published

    Integrated bio/chemical microsystems employing optical detection: the clip-on.. / Leistiko, Otto.

    In: Journal of Micromechanics and Microengineering, Vol. 8, No. 2, 1998, p. 148-50.

    Publication: Research - peer-reviewJournal article – Annual report year: 1998

  113. Published

    Silicon microphones - a Danish perspective. / Bouwstra, Siebe; Storgaard-Larsen, Torben; Scheeper, Patrick; Gulløv, Jens; Bay, J.; Müllenborn, Matthias; Rombach, Pirmin.

    In: Journal of Micromechanics and Microengineering, Vol. 8, No. 2, 1998, p. 64-68.

    Publication: Research - peer-reviewConference article – Annual report year: 1998

  114. 1996
  115. Published

    AFM probes with directly fabricated tips. / Boisen, Anja; Hansen, Ole; Bouwstra, Siebe.

    In: Journal of Micromechanics and Microengineering, Vol. 6, 1996, p. 58-62.

    Publication: Research - peer-reviewJournal article – Annual report year: 1996

  116. Published

    A piezoelectric triaxial accelerometer. / Scheeper, Patrick; Gulløv, Jens.

    In: Journal of Micromechanics and Microengineering, Vol. 6, 1996, p. 131-133.

    Publication: Research - peer-reviewJournal article – Annual report year: 1996

  117. Published

    Improved quality of zinc-oxide thin-films by in-situ annealing. / Mikkelsen, Erik Bak; Reus, Roger De; Bouwstra, Siebe.

    In: Journal of Micromechanics and Microengineering, Vol. 6, 1996, p. 63-65.

    Publication: Research - peer-reviewJournal article – Annual report year: 1996

  118. Published
  119. Published

    Packaging of physical sensors for aggressive media applications. / Dyrbye, K.; Brown, T. R.; Eriksen, Gert Frii.

    In: Journal of Micromechanics and Microengineering, Vol. 6, 1996, p. 187-192.

    Publication: Research - peer-reviewJournal article – Annual report year: 1996

  120. Published

    Protective coatings in harsh environments. / Eriksen, Gert Frii; Dyrbye, K.

    In: Journal of Micromechanics and Microengineering, Vol. 6, 1996, p. 55-57.

    Publication: Research - peer-reviewJournal article – Annual report year: 1996

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