Journal of Micromechanics and Microengineering

ISSNs: 0960-1317

Institute of Physics Publishing, United Kingdom

FI (2012): 1, ISI indexed (2012): yes

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  1. 2013
  2. Published

    Fabrication and bonding of thiol-ene-based microfluidic devices : Technical Note. / Sikanen, Tiina M; Lafleur, Josiane P.; Moilanen, Maria-Elisa; Zhuang, Guisheng; Jensen, Thomas Glasdam; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 3, 2013.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  3. Published

    High-performance spinning device for DVD-based micromechanical signal transduction. / Hwu, En-Te; Chen, Ching-Hsiu; Bosco, Filippo; Wang, Wei-Min; Ko, Hsien-Chen; Hwang, Ing-Shouh; Boisen, Anja; Huang, Kuang-Yuh.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 4, 2013, p. 045016.

    Publication: Research - peer-review › Journal article – Annual report year: 2013

  4. Published

    Injection molding of high aspect ratio sub-100 nm nanostructures. / Matschuk, Maria; Larsen, Niels B.

    In: Journal of Micromechanics and Microengineering, Vol. 23, No. 2, 2013.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  5. 2012
  6. Published

    Fabrication and characterization of MEMS-based PZT/PZT bimorph thick film vibration energy harvesters. / Xu, Ruichao; Lei, Anders; Dahl-Petersen, Christian ; Hansen, K; Guizzetti, M; Birkelund, Karen; Thomsen, Erik Vilain; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 9, 2012.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  7. Published

    High-throughput, temperature-controlled microchannel acoustophoresis device made with rapid prototyping. / Adams, Jonathan D; Ebbesen, Christian L.; Barnkob, Rune; Yang, Allen H J; Soh, H Tom; Bruus, Henrik.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 7, 2012, p. Paper 075017.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  8. External

    Three-dimensional magnetic terahertz metamaterials using a multilayer electroplating technique. / Fan, K.; Strikwerda, A.C.; Averitt, R.D.; Zhang, X.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 4, 2012, p. 045011.

    Publication: Research - peer-review › Journal article – Annual report year: 2012

  9. 2011
  10. Published

    Cantilever-based micro-particle filter with simultaneous single particle detection. / Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 5, 2011.

    Publication: Research - peer-review › Journal article – Annual report year: 2011

  11. Published

    Fabrication of a cantilever-based microfluidic flow meter with nL min(-1) resolution. / Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 1, 2011, p. 015007.

    Publication: Research - peer-review › Journal article – Annual report year: 2011

  12. Published

    Fusion bonding of silicon nitride surfaces. / Reck, Kasper; Østergaard, Christian; Thomsen, Erik Vilain; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 12, 2011, p. 125015.

    Publication: Research - peer-review › Journal article – Annual report year: 2011

  13. Published

    Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers. / Suter, M; Ergeneman, O; Zürcher, J; Schmid, Silvan; Camenzind, A; Nelson, B J; Hierold, C.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 2, 2011, p. 025023.

    Publication: Research - peer-review › Journal article – Annual report year: 2011

  14. Published

    Three-way flexible cantilever probes for static contact. / Wang, Fei; Petersen, Dirch Hjorth; Jensen, Helle Vendelbo; Hansen, Christian; Mortensen, Dennis; Friis, Lars; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 8, 2011, p. 085003.

    Publication: Research - peer-review › Journal article – Annual report year: 2011

  15. Published

    Ultrasensitive bulk disk microresonator-based sensor for distributed mass sensing. / Cagliani, Alberto; Davis, Zachary James.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 4, 2011, p. 045016.

    Publication: Research - peer-review › Journal article – Annual report year: 2011

  16. 2010
  17. Published

    Electroless porous silicon formation applied to fabrication of boron-silica-glass cantilevers. / Teva, Jordi; Davis, Zachary James; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, p. 015034.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  18. E-pub ahead of print

    Embedded resistance wire as a heating element for temperature control in microbioreactors. / Zainal Alam, Muhd Nazrul Hisham; Schäpper, Daniel; Gernaey, Krist.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 5, 2010, p. 055014.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  19. Published

    Fabrication of thin SU-8 cantilevers: initial bending, release and time stability. / Keller, Stephan Urs; Haefliger, D.; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 4, 2010, p. 45024.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  20. Published

    Fast prototyping of injection molded polymer microfluidic chips. / Hansen, Thomas Steen; Selmeczi, David; Larsen, Niels Bent.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, p. 015020.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  21. Published

    High quantum efficiency annular backside silicon photodiodes for reflectance pulse oximetry in wearable wireless body sensors. / Duun, Sune Bro; Haahr, Rasmus Grønbek; Hansen, Ole; Birkelund, Karen; Thomsen, Erik Vilain.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 7, 2010.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  22. Published

    Injection molded chips with integrated conducting polymer electrodes for electroporation of cells. / Andresen, Kristian; Hansen, Morten; Matschuk, Maria; Jepsen, Søren Terpager; Sørensen, Henrik Schiøtt; Utko, Pawel; Selmeczi, Dávid; Hansen, Thomas Steen; Larsen, Niels Bent; Rozlosnik, Noemi; Taboryski, Rafael Jozef.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 5, 2010, p. 55010.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  23. Published

    Manipulation and in situ transmission electron microscope characterization of sub-100 nm nanostructures using a microfabricated nanogripper. / Cagliani, Alberto; Wierzbicki, Rafal; Occhipini, Luigi; Petersen, Dirch Hjorth; Dyvelkov, Karin Nordström; Sardan Sukas, Özlem; Geilman Herstrøm, Berit; Booth, Tim; Bøggild, Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 3, 2010, p. 030509.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  24. Published

    MEMS climate sensor for crops in greenhouses. / Birkelund, Karen; Jensen, Kim Degn; Højlund-Nielsen, Emil; Nagstrup, Johan; Lei, Anders; Petersen, Søren D.; Andreassen, Andrea U.; Thomsen, Erik Vilain.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 8, 2010, p. 085021.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  25. Published

    One-step fabrication of microfluidic chips with in-plane, adhesive-free interconnections. / Sabourin, David; Dufva, Martin; Jensen, Thomas Glasdam; Kutter, Jörg Peter; Snakenborg, Detlef.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 3, 2010, p. 037001.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  26. Published

    Pulsatile microfluidics as an analytical tool for determining the dynamic characteristics of microfluidic systems. / Vedel, Søren; Olesen, Laurits Højgaard; Bruus, Henrik.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 3, 2010, p. 035026.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  27. Published

    Single mode dye-doped polymer photonic crystal lasers. / Christiansen, Mads Brøkner; Buss, Thomas; Smith, Cameron; Petersen, Sidsel Rübner; Jørgensen, Mette Marie; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 11, 2010.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  28. Published

    Thermoplastic microcantilevers fabricated by nanoimprint lithography. / Greve, Anders; Keller, Stephan Urs; Vig, Asger Laurberg; Kristensen, Anders; Larsson, David; Yvind, Kresten; Hvam, Jørn Märcher; Cerruti, Marta; Majumdar, Arunava; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, p. 15009.

    Publication: Research - peer-review › Journal article – Annual report year: 2010

  29. 2009
  30. Published

    A support structure for biomimetic applications. / Vogel, Jörg; Perry, Mark; Hansen, Jesper Søndergaard; Pierre-Yves, Bolinger; Helix Nielsen, Claus; Geschke, Oliver.

    In: Journal of Micromechanics and Microengineering, Vol. 19, No. 2, 2009, p. 025026.

    Publication: Research - peer-review › Journal article – Annual report year: 2009

  31. Published

    Competition between the Thermal Gradient and the Bimorph Effect in Locally Heated MEMS Actuators. / Jeppesen, Claus; Mølhave, Kristian; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 19, No. 1, 2009, p. 015008.

    Publication: Research - peer-review › Journal article – Annual report year: 2009

  32. Published

    Development of an Automation Technique for the Establishment of Functional Lipid Bilayer Arrays. / Hansen, Jesper Søndergaard; Perry, Mark; Vogel, Jörg; Vissing, Thomas; Hansen, Christian Rein; Geschke, Oliver; Emnéus, Jenny; Helix Nielsen, Claus.

    In: Journal of Micromechanics and Microengineering, Vol. 19, No. 2, 2009, p. 025014.

    Publication: Research - peer-review › Journal article – Annual report year: 2009

  33. Published

    Interconnection blocks: a method for providing reusable, rapid, multiple, aligned and planar microfluidic interconnections. / Sabourin, David; Snakenborg, Detlef; Dufva, Hans Martin.

    In: Journal of Micromechanics and Microengineering, Vol. 19, No. 3, 2009, p. 035021.

    Publication: Research - peer-review › Journal article – Annual report year: 2009

  34. 2008
  35. Published

    A compact system for large-area thermal nanoimprint lithography using smart stamps. / Pedersen, Rasmus Haugstrup; Hansen, Ole; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 5, 2008, p. 055018.

    Publication: Research - peer-review › Journal article – Annual report year: 2008

  36. Published

    An Electrochromatography Chip with Integrated Waveguides for UV Absorbance Detection. / Gustafsson, Omar; Mogensen, Klaus Bo; Ohlsson, Pelle Daniel; Liu, Y; Jacobson, S. C.; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 5, 2008, p. 055021.

    Publication: Research - peer-review › Journal article – Annual report year: 2008

  37. Published

    A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides. / Nordström, M.; Calleja, M.; Hübner, Jörg; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 1, 2008.

    Publication: Research - peer-review › Journal article – Annual report year: 2008

  38. Published

    A theoretical analysis of the resolution due to diffusion and size dispersion of particles in deterministic lateral displacement devices. / Heller, Martin; Bruus, Henrik.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 7, 2008, p. 075030-075035.

    Publication: Research - peer-review › Journal article – Annual report year: 2008

  39. Published

    Processing of thin SU-8 films. / Keller, Stephan Urs; Blagoi, Gabriela; Lillemose, Michael; Häfliger, Daniel; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 18, No. 12, 2008, p. 125020.

    Publication: Research - peer-review › Journal article – Annual report year: 2008

  40. 2007
  41. Published

    A fast and reliable way to establish fluidic connections to planar microchips. / Snakenborg, Detlef; Perozziello, Gerardo; Geschke, Oliver; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 17, No. 1, 2007, p. 98-103.

    Publication: Research - peer-review › Journal article – Annual report year: 2007

  42. Published

    An all-polymer micropump based on the conductive polymer poly(3,4-ethylenedioxythiophene) and a polyurethane channel system. / Hansen, Thomas Steen; West, Keld; Hassager, Ole; Larsen, Niels Bent.

    In: Journal of Micromechanics and Microengineering, Vol. 17, No. 5, 2007, p. 860-866.

    Publication: Research - peer-review › Journal article – Annual report year: 2007

  43. Published

    Flexible SiO2 cantilevers for torsional self-aligning micro scale four-point probes. / Kjær, Daniel; Gammelgaard, Lauge; Bøggild, Peter; Hansen, Ole; Petersen, Peter Rasmus Ebsen; Hansen, J. E.

    In: Journal of Micromechanics and Microengineering, Vol. 17, 2007, p. 1910-1915.

    Publication: Research - peer-review › Journal article – Annual report year: 2007

  44. Published

    PCR biocompatibility of Lab-on-a-chip and MEMS materials. / Christensen, Troels Balmer; Pedersen, Christian Møller; Grøndahl, K. G.; Jensen, Thomas Glasdam; Bang, Dang Duong; Wolff, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 17, No. 8, 2007, p. 1527-1532.

    Publication: Research - peer-review › Journal article – Annual report year: 2007

  45. 2006
  46. Published

    Direct milling and casting of polymer-based optical waveguides for improved transparency in the visible range. / Snakenborg, Detlef; Perozziello, Gerardo; Klank, Henning; Geschke, Oliver; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 2, 2006, p. 375-381.

    Publication: Research - peer-review › Journal article – Annual report year: 2006

  47. Published

    The effect of soft bake temperature on the polymerization of SU-8 photoresist. / Anhøj, Thomas Aarøe; Jørgensen, Anders Michael; Zauner, Dan; Hübner, Jörg.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 9, 2006, p. 1819.

    Publication: Research - peer-review › Journal article – Annual report year: 2006

  48. Published

    Transient pressure drops of gas bubbles passing through liquid-filled microchannel Contractions: an experimental study. / Chio, H.; Jensen, Mads Jakob; Wang, X.; Bruus, Henrik; Attinger, D.

    In: Journal of Micromechanics and Microengineering, Vol. 16, No. 1, 2006, p. 143-149.

    Publication: Research - peer-review › Journal article – Annual report year: 2006

  49. 2005
  50. Published

    A microfluidic dye laser fabricated by nanoimprint lithography in a highly transparent and chemically resistant cyclo-olefin copolymer (COC). / Nilsson, Daniel; Balslev, Søren; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 2, 2005, p. 296-300.

    Publication: Research - peer-review › Journal article – Annual report year: 2005

  51. Published

    Electro-thermally actuated microgrippers with integrated force feedback. / Mølhave, Kristian; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 6, 2005, p. 1265-1270.

    Publication: Research - peer-review › Journal article – Annual report year: 2005

  52. Published

    Investigations of the isotropic etch of an ICP source for silicon microlens mold fabrication. / Larsen, Kristian Pontoppidan; Ravnkilde, Jan Tue; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 4, 2005, p. 873-882.

    Publication: Research - peer-review › Journal article – Annual report year: 2005

  53. Published

    Refractive microlenses produced by excimer laser machining of poly(methyl methacrylate). / Jensen, Martin Frøhling; Krühne, Ulrich; H., L.; Geschke, Oliver.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 1, 2005, p. 91-97.

    Publication: Research - peer-review › Journal article – Annual report year: 2005

  54. Published

    Single mode solid state distributed feedback dye laser fabricated by grey scale electron beam lithography on dye doped SU-8 resist. / Balslev, Søren; Rasmussen, Torben; Shi, Peixiong; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 15, No. 12, 2005, p. 2456-2460.

    Publication: Research - peer-review › Journal article – Annual report year: 2005

  55. 2004
  56. Published

    Microstructure Fabrication with a CO_2 Laser System. / Snakenborg, Detlef; Klank, Henning; Kutter, Jörg Peter.

    In: Journal of Micromechanics and Microengineering, Vol. 14, No. 2, 2004, p. 182-189.

    Publication: Research - peer-review › Journal article – Annual report year: 2004

  57. Published

    PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated optics. / Olsen, Brian Bilenberg; Nielsen, Theodor; Clausen, Bjarne Hans; Kristensen, Anders.

    In: Journal of Micromechanics and Microengineering, Vol. 14, No. 6, 2004, p. 814-818.

    Publication: Research - peer-review › Journal article – Annual report year: 2004

  58. Published

    Rendering SU-8 hydrophilic to facilitate use in micro channel fabrication. / Nordström, Maria; Marie, Rodolphe; Gomez, Montserrat; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 14, No. 12, 2004, p. 1614-1617.

    Publication: Research - peer-review › Journal article – Annual report year: 2004

  59. 2002
  60. Published

    PIV measurements in a microfluidic 3D-sheathing structure with three-dimensional flow behaviour. / Klank, Henning; Goranovic, Goran; Kutter, Jörg Peter; Gjelstrup, Henrik; Michelsen, J.; Westergaard, C.H.

    In: Journal of micromechanics and microengineering, Vol. 12, No. 6, 2002, p. 862-869.

    Publication: Research - peer-review › Journal article – Annual report year: 2002

  61. 2001
  62. Published

    Balanced membrane micromachined loudspeaker for hearing instrument application. / Rehder, Jörg; Rombach, Pirmin; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 11, No. 4, 07.2001, p. 334-338.

    Publication: Research - peer-review › Journal article – Annual report year: 2001

  63. 1999
  64. Published

    Fabrication and characterization of a piezoelectric accelerometer. / Reus, Roger De; Gulløv, Jens; Scheeper, Patrick.

    In: Journal of Micromechanics and Microengineering, Vol. 9, No. 2, 1999, p. 123-126.

    Publication: Research - peer-review › Journal article – Annual report year: 1999

  65. Published

    Micromachined double backplate differential capacitive microphone.. / Bay, Jesper; Hansen, Ole; Bouwstra, Siebe.

    In: Journal of Micromechanics and Microengineering, Vol. 9, No. 1, 1999, p. 30-33.

    Publication: Research - peer-review › Journal article – Annual report year: 1999

  66. Published

    Tantalum oxide thin films as protective coatings for sensors.. / Christensen, Carsten; Reus, Roger De; Bouwstra, Siebe.

    In: Journal of Micromechanics and Microengineering, Vol. 9, No. 2, 1999, p. 113-118.

    Publication: Research - peer-review › Journal article – Annual report year: 1999

  67. 1998
  68. Published

    Silicon microphones - a Danish perspective. / Bouwstra, Siebe; Storgaard-Larsen, Torben; Scheeper, Patrick; Gulløv, Jens; Bay, J.; Müllenborn, Matthias; Rombach, Pirmin.

    In: Journal of Micromechanics and Microengineering, Vol. 8, No. 2, 1998, p. 64-68.

    Publication: Research - peer-review › Conference article – Annual report year: 1998

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