Journal of Micromechanics and Microengineering

ISSNs: 0960-1317, 09601317

Institute of Physics Publishing, United Kingdom

FI (2013): 1, ISI indexed (2013): yes

Central database

Journal

  1. 2012
  2. Three-dimensional magnetic terahertz metamaterials using a multilayer electroplating technique. / Fan, K.; Strikwerda, A.C.; Averitt, R.D.; Zhang, X.

    In: Journal of Micromechanics and Microengineering, Vol. 22, No. 4, 2012, p. 045011.

    Publication: Research - peer-reviewJournal article – Annual report year: 2012

  3. 2011
  4. Published
  5. Published

    Fabrication of a cantilever-based microfluidic flow meter with nL min(-1) resolution. / Noeth, Nadine-Nicole; Keller, Stephan Sylvest; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 1, 2011, p. 015007.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  6. Published

    Fusion bonding of silicon nitride surfaces. / Reck, Kasper; Østergaard, Christian; Thomsen, Erik Vilain; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 12, 2011, p. 125015.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  7. Published

    Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers. / Suter, M; Ergeneman, O; Zürcher, J; Schmid, Silvan; Camenzind, A; Nelson, B J; Hierold, C.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 2, 2011, p. 025023.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  8. Published
  9. Published

    Ultrasensitive bulk disk microresonator-based sensor for distributed mass sensing. / Cagliani, Alberto; Davis, Zachary James.

    In: Journal of Micromechanics and Microengineering, Vol. 21, No. 4, 2011, p. 045016.

    Publication: Research - peer-reviewJournal article – Annual report year: 2011

  10. 2010
  11. Published

    Electroless porous silicon formation applied to fabrication of boron-silica-glass cantilevers. / Teva, Jordi; Davis, Zachary James; Hansen, Ole.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 1, 2010, p. 015034.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

  12. E-pub ahead of print
  13. Published

    Fabrication of thin SU-8 cantilevers: initial bending, release and time stability. / Keller, Stephan Urs; Haefliger, D.; Boisen, Anja.

    In: Journal of Micromechanics and Microengineering, Vol. 20, No. 4, 2010, p. 45024.

    Publication: Research - peer-reviewJournal article – Annual report year: 2010

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