Talk about "Review of electrical characterization of ultra-shallow junctions with micro four-point probes" at INSIGHT 2009, San Francisco, US
Activity: Lecture and oral contribution
Ole Hansen - Speaker, 30 May 2009
- Technical University of Denmark
- Department of Micro- and Nanotechnology
- MicroElectroMechanical Systems Section
- Silicon Microtechnology Group
ID: 2359955